- P-ISSN 1225-0163
- E-ISSN 2288-8985
Laser induced breakdown spectroscopy (LIBS)의 정량분석에 대한 측정의 정확도를 향상시키고자, 플라즈마의 특성을 분석하여, 상대적으로 안정적인 Outer sphere에 해당하는 영역을 측정하는 방법으로 Cu alloy sample을 측정하여 분석하였다. 신호의 높은 재현성을 고려한 측정 조건에서 측정이 수행되었으며, 600 mtorr 진공상태에서 20 ㎜정도의 크기로 플라즈마를 성장시켜, Outer sphere 영역인 플라즈마 성장방향으로 6.0 ㎜ 지점을 측정하였다. 그 결과 Cu의 선형 분석 R² 값은 0.9886로, Ni의 R² 값은 0.9988로 획득하였으며, 측정오차는 Ni의 경우 기존보다는 향상된 0.78%의 측정오차를 획득하였다.
A laser induced breakdown spectroscopy (LIBS) measurement was carried out to derive an optimized measurement condition with a high reproducibility and to grow a plasma sphere to 20 ㎜ high under a 600 mtorr vacuum in order to improve an accuracy of measurement. The measurement of the plasma was taken at a 6.0 ㎜ distance, in the direction of a plasma sphere, from a sample. This location belongs to the outer sphere region in the plasma. The calibration curve of ‘Ni’ and ‘Cu’ was acquired by the signal intensity ratio and the atomic ratio for the samples, and linear regression of “Cu” was R²=0.9886, and the linear regression of “Ni” was R²=0.9988. The accuracy of LIBS was improved pre-existence as the measurement error of “Ni” was 0.78%.
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