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  • P-ISSN 1225-0163
  • E-ISSN 2288-8985

Study for conductive and Non-conductive Multi-layers Depth Profiling Analysis of Radio Frequency Gas-jet Boosted Glow Discharge Spectrometry

Analytical Science and Technology / Analytical Science and Technology, (P)1225-0163; (E)2288-8985
2002, v.15 no.2, pp.108-114






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Abstract

The new system using a glow discharge atomic emission spectrometer for the direct analysis of solid samples has been developed and characterized. The system was consisted of new glow discharge cell improved previous gas-jet boosted nozzle and radio-frequency power supply. In the case of previous type glow discharge chamber, it had been fitted trace analysis of low alloy steel with low discharge power, because it was to decrease redeposition and increase sample weight loss. But it had a problem that plasma becomes unstale due to increased sample weight loss and redeposition resulting from the high discharge power. Because of being problem of previous glow discharge, it is impossible to analyze using high power. The modified gas-jet boosted glow discharge to solve this problem would improve to be less sample loss rate of modified nozzle than sample loss rate of previous nozzle on the equal discharge condition, and improve to increase stability of plasma. The effect of discharge parameters such as discharge pressure, gas flow rate and power on the sample loss rate, emission intensity has been studied to find optimum discharge conditions. The calibration curves of Fe were obtained with 3 low-alloy samples.

keywords
modified gas jetting nozzle, radio-frequency, trace analysis


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