- P-ISSN 1225-0163
- E-ISSN 2288-8985
X-Ray Photoelectron Spectroscopy(XPS) and Rutherford Backscattering Spectroscopy(RBS) are used for the analysis of additives, examination of chemical structure and determination of identity with qualitative and quantitative analysis of surface elements, binding energy level and depth profiling in the surface. We analyzed surface of polyethylene, acrylonitrile butadien rubber, polypropylene, glass, fiber and paper treated with <TEX>$XeF_2$</TEX> or C-F plasma by XPS and RBS. It was found that fluoro element was penetrated to sample surface and the distribution of surface elements are different than untreated samples.