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- E-ISSN 2288-8985
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- P-ISSN1225-0163
- E-ISSN2288-8985
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Analysis of Trace Trichlorosilane in High Purity Silicon Tetrachloride by Near-IR Spectroscopy
Analytical Science and Technology / Analytical Science and Technology, (P)1225-0163; (E)2288-8985
2002, v.15 no.1, pp.13-90
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(2002). Analysis of Trace Trichlorosilane in High Purity Silicon Tetrachloride by Near-IR Spectroscopy. Analytical Science and Technology, 15(1), 13-90.
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Abstract
The content of <TEX>$SiHCl_3$</TEX> as a trace impurity in <TEX>$SiCl_4$</TEX> was analyzed by Near IR spectrophotometer with optical fiber. The strong absorption bands of <TEX>$5345{\sim}5116cm^{-1}$</TEX> and <TEX>$4848{\sim}4349cm^{-1}$</TEX> were used for analysis of <TEX>$SiHCl_3$</TEX>, and the detection limit of impurity <TEX>$SiCl_3$</TEX> was appeared to be 0.005 ％ in the spectrum. The quantitative analysis by Near IR spectrophotometry showed the analytical possibility of trace impurity in <TEX>$SiCl_4$</TEX> without sample pre-treatment not only in the laboratory but also in the field.
- keywords
- near IR, optical fiber, silicon tetrachloride, trichlorosilane
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