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Synthesis and property analysis of hydropolysilanes for amorphous and polycrystalline silicon
Analytical Science and Technology / Analytical Science and Technology, (P)1225-0163; (E)2288-8985
2011, v.24 no.2, pp.105-112
https://doi.org/10.5806/AST.2011.24.2.105
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(2011). Synthesis and property analysis of hydropolysilanes for amorphous and polycrystalline silicon. Analytical Science and Technology, 24(2), 105-112, https://doi.org/10.5806/AST.2011.24.2.105
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Abstract
Syntheses and property analysis of hydropolysilanes were studied. Those hydropolysilanes can be utilized as precursors for amorphous silicon and polycrystallline silicon for the purpose of the solar cell and the thin film transister for the next generation's semiconductors. Most important characteristics of this study are to find optimized conditions for the synthesis and property analysis of soluble hydropolysilanes. Also the possibility of pyrolytic conversion to amorphous and polycrystalline silicon was investigated.
- keywords
- chloropolysilanes (CPS), hydropolysilanes (HPS), property analysis of hydropolysilanes, amorphous silicon (a-Si), polycrystalline silicon (p-Si)
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