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The Characterization of Structural and Optical Properties for rf Magnetron Sputtered <TEX>$(BaSr)TiO_3$</TEX> Thin Film
Analytical Science and Technology / Analytical Science and Technology, (P)1225-0163; (E)2288-8985
1993, v.6 no.2, pp.239-246
Kim,
T., Oh,
M., &
Kim,
C.
(1993). The Characterization of Structural and Optical Properties for rf Magnetron Sputtered <TEX>$(BaSr)TiO_3$</TEX> Thin Film. Analytical Science and Technology, 6(2), 239-246.
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Abstract
The structure of <TEX>$(BaSr)TiO_3$</TEX> thin film deposited on ITO coated glass, bare glass and (100) Si substrates was not changed, but the crystallinity was improved by the polycrystalline ITO layer and (100) Si substrate. The composition of <TEX>$(BaSr)TiO_3$</TEX> thin film deposited on ITO coated glass was nearly stoichiometric ((Ba+Sr)/Ti
- keywords
- ITO coated glass, <TEX>$(BaSr)TiO_3$</TEX>
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