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- E-ISSN 2288-8985
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Analysis of multi-layered Surface with Glow Discharge-Mass Spectrometry
Analytical Science and Technology / Analytical Science and Technology, (P)1225-0163; (E)2288-8985
1997, v.10 no.5, pp.357-361
Pak,
Y., Lee,
G., &
Kim,
H.
J.
(1997). Analysis of multi-layered Surface with Glow Discharge-Mass Spectrometry. Analytical Science and Technology, 10(5), 357-361.
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Abstract
A Griemm type Glow Discharge cell is attached to a commercial quadrapole based ICP-MS and used for the analysis of surface analysis. By employing 2.0mm diameter, mode and proper experimental conditions, several layers of few <TEX>${\mu}m$</TEX> thickness are analysed within 30 minutes. Multi-layers of Cu-Ni, Fe-Ni are analyzed with the resolution of 10nm by GDMS. Proper experimental conditions make a flat bottom crater shape and good resolution for multi-layer depth profile study.
- keywords
- glow discharge, glow discharge mass spectrometry, depth profile study, multi-layer profile study
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