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- E-ISSN 2288-8985
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- P-ISSN1225-0163
- E-ISSN2288-8985
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Semiquantitative Dynamic Headspace GC-MS Analysis for Organic Compounds Outgassed from FAB Materials of Air Shower
Analytical Science and Technology / Analytical Science and Technology, (P)1225-0163; (E)2288-8985
2000, v.13 no.4, pp.412-422
Park,
H., Baig,
S., Kim,
Y., &
Lee,
K.
(2000). Semiquantitative Dynamic Headspace GC-MS Analysis for Organic Compounds Outgassed from FAB Materials of Air Shower. Analytical Science and Technology, 13(4), 412-422.
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Abstract
The polymeric FAB materials of air shower used in clean room of wafer industry have been outgassed with the dynamic headspace (ca.<TEX>$100^{\circ}C$</TEX>) for half an hour, and analyzed using GC-MS. The air in the clean room running air shower was sampled using sorbent tube method, and the organic compounds adsorbed in the sorbent tube were extracted using Soxhlet extraction method, and analyzed using GC-MS. The analytical results from FAB materials of air shower (electric over current relay, acryl plate. polycarbonate window, filter, fan housing, steel galvanized cold plate and canvas buffer) indicated that most of chemicals were originated from polymer fragments of FAB materials. Their analytical results have been compared with those from the air of clean room running air shower. These comparative results could lead to identify whether the sources of trace organic contaminants in clean room air are originated from the polymeric FAB material of air shower.
- keywords
- shower, headspace, GC-MS, sorbent tube, soxhlet
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