- P-ISSN 1225-0163
- E-ISSN 2288-8985
- Log In/Sign Up
- P-ISSN1225-0163
- E-ISSN2288-8985
- SCOPUS, ESCI, KCI
Article Detail
Home > Article Detail
Effect of oxidants and additives on the polishing performance in tungsten CMP slurry
Analytical Science and Technology / Analytical Science and Technology, (P)1225-0163; (E)2288-8985
2006, v.19 no.5, pp.394-399
&
(2006). Effect of oxidants and additives on the polishing performance in tungsten CMP slurry. Analytical Science and Technology, 19(5), 394-399.
- Downloaded
- Viewed
Abstract
The polishing performance and the relationships of electrochemistry depending upon oxidizers and additives in the tungsten CMP slurry used in semiconductor industry were investigated. Hydrogen peroxide, ferric nitrate and potassium iodate were used as oxidizers and they showed different oxidation reactions on tungsten film depending on the kind of oxidizers and pH of slurry. The differences influenced the polishing performance. Etching reaction was predominated in the hydrogen peroxide. However, passivation reaction was prevailed in ferric nitrate and potassium iodate. TMAH and KOH raised the potential energy and removal rate of tungsten, and improved a dispersion characteristic of slurry by increasing absolute value of zeta potential. Addition of 100 ppm of poly(acrylic acid) of M.W. 250,000 improved dispersion ability.
- keywords
- CMP
Reference
1
Preston, F, (1972) J. the society of glass technology,
2
Ziomek-Moroz, M, (2003) Wear,
3
Ernur, D, (2005) J. Electroche. soc.,
4
Yang, K, (1994) Mat. Res. Soc. Symp. Proc.,
5
Kaufman, F.B, (1991) J. Electrochem. Soc.,
6
Lim, G, (2006) J. Electrochem. Soc.,
7
Stein, D.J, (1998) J. Electrochem. Soc.,
8
Ernur, D, (2005) J. Electrochem. Soc.,
9
Pourbaix, M, (1974) Atrlas of Electrochemical Equilibria in Aqueous Solutions, NACE, Houstonn, TX
10
Palla, B.J, (2000) J. Colloid and Interface Science,
Other articles from this issue
- Generation of calibration standard gases using capillary gas divider : uncer-tainty measurement and method validation
- Characterizaion of composite prepared with different mixing ratios of TiO2 to activated carbon and their photocatalytic activity
- Determination of fluoride in fluorite mine wastewater by ion chromatogaraphy with post-wash technique
- Study on preparation of a thin film type of ZnS(Ag) scintillaator sheet for alpha-ray detection
- Effect of oxidants and additives on the polishing performance in tungsten CMP slurry
- Quantitative analysis of hydrogen in thin film by scattering-recoil co-measurenment technique
- Modification of conventional X-ray diffractometer for the measurement of phase distribution in a narrow region
- Determining of polycyclic aromatic hydrocarbons in domestic vegatables and fruits
- Effect of promoter on platinu, catalyst for oxidation of VOCs
- Rapid and simultaneous ddetermination of metabolites of organic solvents in human urine by high-performance liquid chromatography using a monolithic column
- Determination of 11-nor-9-carboxy-△9-tetrahydrocannabinol(THCCOOH) in human urine by solid-phase extraction and GC/MS
- more
Recommanded Articles
This website recommended the use the Chrome browser for journal website.