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Quantitative analysis of hydrogen in thin film by scattering-recoil co-measurenment technique
Analytical Science and Technology / Analytical Science and Technology, (P)1225-0163; (E)2288-8985
2006, v.19 no.5, pp.400-406
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(2006). Quantitative analysis of hydrogen in thin film by scattering-recoil co-measurenment technique. Analytical Science and Technology, 19(5), 400-406.
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Abstract
Hydrogen analysis by elastic recoil detection has been performed utilizing polyimide film as a reference sample of known hydrogen content assuming the soundness of ion beam current integration. However beam current integration at higher incidence angle is not reliable. Scattering yield per unit fluence by current integration which is normalized per unit path length decreases as the sample tilt angle is getting higher. Moreover because beam current integration at high tilt angle is incomplete, hydrogen evaluation is very risky by direct comparison of sequentially collected recoil spectra between reference and target sample. In this study, primary ion beam dose is determined by backscattering spectrum that is collected simultaneously with recoil spectrum instead of ion beam current integration in order to reduce uncertainty arising in the process of current integration and to enhance the reliability of quantitative analysis. Three test samples are selected <TEX>$-7.6{\mu}m$</TEX> polyimide film, hydrogen implanted silicondioxide and Au deposited carbon wafer- and analyzed by two methods and compared.
- keywords
- Hydrogen analysis, ERD, Thin film
Reference
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Ye, S. J, (1991) Determination of Parameters in O(α, α) O Elastic Resonance Scattering and Its Application to the Analysis of Thin Oxide Layer, Korean Applied Physics
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