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Characterization and Emission/Absorption Study of a Grimm-type Glow discharge source in the application of high frequency Glow Discharge
Analytical Science and Technology / Analytical Science and Technology, (P)1225-0163; (E)2288-8985
1994, v.7 no.2, pp.155-164
Suh,
J., &
Woo,
J.
(1994). Characterization and Emission/Absorption Study of a Grimm-type Glow discharge source in the application of high frequency Glow Discharge. Analytical Science and Technology, 7(2), 155-164.
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Abstract
A conventional Grimm-type glow discharge source was constructed and applied to radio-frequency(13.56MHz) discharge for metal and ceramic analysis. We investigated the emission spectrum for aluminium and aluminium oxide and the influence of discharge operating paramaters including argon pressure, rf-power and DC-bias voltages at the sample-side electrode. Scanning Electron Microscope(SEM) also was used to investigate the effect of rf-sputtering on the microstructure formation of the aluminium oxide. Linear analytical calibration curves were constructed for Manganese and zinc element in samples of low alloy steel(BAS 401-405) and brass(NIST 1108-1117).
- keywords
- rf-Glow Discharge, Ceramic analysis, Emission spectrometry, Absorption spectrometry
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